好處
功能
典型應用
規格
| 類型 | SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|---|
| Maximum Temperature | 200°C | |
| Sensor head Size (Maimum envelope) | 23.87 mm O.D. x 29.19 mm (0.94 in. O.D. x 1.15 in.) | |
| Mounting Feedthrough | KF 40 | |
| Materials | ||
| Body and Holder | 304 stainless steel | |
| Springs | Au plated BeCu | |
| Coaxial Line | 5 mm (1.88 in.) O.D. stainless steel | |
| Other Mechanical Parts | 18-8 or 304 stainless steel, Hasloy® c276 | |
| Insulators | >99% Al2O3 in vacuum: Teflon® used elsewhere | |
| Wire | 1. Ni (in vacuum)2. Ni plated Cu (elsewhere) | |
| Braze | Vacuum process high temperature NiCr alloy | |
| Crystal | 13.97 mm (0.550 in.) diameter | |
零件號
| SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|
| 零件號 | 明細 |
| 750-7000-G5 | SEMI QCM SENSOR ASSY 50MM |
| 750-7000-G6 | Semi QCM Sensor Assy 60mm |
| 750-7000-G7 | Semi QCM Sensor Assy 70mm |
| 750-7000-G8 | Semi QCM Sensor Assy 80mm |
| 750-7000-G9 | Semi QCM Sensor Assy 90mm |
| 750-7000-G10 | Semi QCM Sensor Assy 100mm |
| 750-7000-G11 | Semi QCM Sensor Assy 110mm |
| 750-7000-G12 | Semi QCM Sensor Assy 120mm |
| 750-7000-G13 | Semi QCM Sensor Assy 130mm |
| 750-7000-G14 | Semi QCM Sensor Assy 140mm |
| 750-7000-G15 | Semi QCM Sensor Assy 150mm |
耗材
| SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|
| 零件號 | 明細 |
| 750-7013-G1S | Crystal Holder Assembly Spare |
| 750-1090-G10 | Sensor Crystals, 6MHz, SC Alloy |
備件
| SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|
| 零件號 | 明細 |
| 007-023 | 陶瓷夾持器 |
| 750-171-P1 | 指形彈簧觸點 |
| 750-7005-G1S | Crystal Holder and Retainer Spring Spare Assembly |
數據表
其他文件
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