新型肖特基場發射掃描電鏡SU7000－可獲得樣品的各種信息，實現高通量分析－肖特基場發射掃描電鏡SU7000，它縮短了通過采集多種信號獲取樣品多種信息的時間，真正實現了高通…
新型肖特基場發射掃描電鏡SU7000
－可獲得樣品的各種信息，實現高通量分析－
肖特基場發射掃描電鏡SU7000，它縮短了通過采集多種信號獲取樣品多種信息的時間，真正實現了高通量的觀察與分析。
SU7000外觀圖
掃描電子顯微鏡（SEM）可通過檢測樣品激發出的二次電子、背散射電子、X射線等信號，獲得從微細結構到組成成分等各種信息，因此被廣泛應用于納米技術、半導體、電子器件、生物、材料等諸多領域。隨著SEM的應用范圍在不斷擴大，對觀察時間的縮短、信號的迅速高效采集提出了更進一步的需求。
SU7000采用全新設計的探測器，使得對二次電子信號、背散射電子信號的檢測以及分離能力大大提升。以前我們要根據獲得的信號來調整樣品與透鏡之間的距離（工作距離／以下簡稱WD），以設置合適的觀察與分析條件，而SU7000通過新研發的樣品倉以及檢測器系統，可在不改變WD的條件下更高效地接收各種信號，縮短了樣品觀察和分析的時間，提高了測試效率。
而且，SU7000還配置了可同時6通道顯示界面（前代機型只能同時顯示4通道），進一步升級SEM控制系統，大幅提高了信號獲取速度，由此實現了樣品的高通量觀察。
它還標配超大樣品倉，增設了附件接口，可適用于各種樣品的觀察與分析。
日立*將在8月5日（星期日）～8月9日（星期四）在美國馬里蘭州舉辦的“Microscopy & Microanalysis”及9月5日（星期三）～9月7日（星期五）在幕張展示中心（千葉縣千葉市）舉辦的“JASIS 2018”上展示這款SU7000，預計每年銷量有望達150臺。
日立*科學系統事業部以2020年成為電子顯微鏡行業為中期戰略目標，今后仍將全力推動產品研發與市場推廣，努力為制造業作出更大的貢獻。作為*、前沿的事業創新型企業，今后以成為提供*和解決方案的企業為目標，始終站在客戶的立場，快速滿足客戶和市場需求。
【主要特點】
1．在相同WD的條件下，可同時實現二次電子、背散射電子觀察與X射線分析
2．多可同時實現6通道檢測與顯示
3．在大像素10,240 x 7,680時，也可獲得圖像數據
4．同級別*設備中多的可配置18個附件接口
5．支持低300Pa的低真空模式（選配）
*空間分辨率在1 nm/1 kV以下
【主要規格】
產品名稱 | SU7000 |
電子源 | ZrO/W熱場發射（肖特基熱場發射） |
二次電子分辨率 | 0.8 nm（加速電壓 15 kV） 0.9 nm（加速電壓 1 kV） |
加速電壓 | 0.1～30 kV |
放大倍率 | 20～2,000,000倍 |
束流 | 大200 nA |
樣品臺 | X/Y/Z : 135 x 100 x 40 （mm） |
Key Concept
Imaging Performance
Enhanced Information Acquisition
The advanced detection system of the SU7000 streamlines acquisition of structural, topographical, compositional, crystallographic, and other types of information by minimizing changes to microscope conditions, such as working distance or accelerating voltage.
Specimen: Organic-coated gold rods
Specimen courtesy of: Mr. Smart and Ms. Je Chemistry Dept.,
Vassar College
Simultaneous image acquisition for surface micro-structural information (UD), surface coating (MD), and overall topographic information (LD). Acceleration voltage: 1 kV
Intuitive Graphical User Interface
Enhanced Signal Display
Highly Flexible Screen Layout
The software is capable of display 1, 2, or 4 signals including the chamber scope or SEM MAP on a single monitor.
Additionally, the operation panel can be customized to display submenus anywhere on the screen.
Dual Monitor
The first monitor can be used as a dedicated image display while the second monitor is utilized for operation.
Five detector images (UD, LD, UVD, MD, and PD-BSED) and SEM MAP of non-metallic inclusions in a steel specimen are displayed (left).
The screen s the operation panel menu and the thumbnail image window on one screen (right).
The dual-monitor configuration supports increased productivity with expanded w
Expandable Observation and Analysis
Large specimen chamber and large stage
The specimen chamber can accommodate a tall specimen of φ 200 mm or 80 mm in height and 18 accessory ports. The large stage travels 135 mm (X) x 100 mm (Y) and can accept up to 2 kg of specimen.(*) Large specimen or variable type of sub-stages can be easily mounted on the front-opening large stage door.
external view of the specimen chamber featuring 18 accessories por
external view of the stage. XY movable range: 135×100 mm
Camera Navigation(*)
Left: Picture of the sample captured by the camera equipped inside the chamber.
Right: Camera image transferred to the SEM MAP screen for navigation.
The camera navigation feature correlates an optical image to the target observation area.
The camera installed in the specimen chamber captures the specimen image at the time of specimen introduction. The image is transferred to the SEM MAP screen for a graphically driven navigation interface.
Camera navigation supports a maximum of φ 100 mm specimen.
Detection System Enabling Dynamic Observation
The SU7000 supports observation under various environmental conditions. A variety of detectors (*) such as UVD and MD are selectable in addition to the PD-BSED for observation under low-vacuum conditions.
Detector Selection Under Low-Vacuum Conditions
Specimen: Fiber with metallic oxide
Left: MD (Backscattered electron) image
Right: UVD (SE image)
The oxide dispersion and fiber layering state are observed respectively.
Improved PD-BSED Response Speed
Left: Traditional PD-BSED response at the scan rate of 30 ms x 64 frames
Right: SU7000 PD-BSED image demonstrating improved response and image quality to expａnd in-situ observation capability
Specifications
| Image Resolution | Resolution SE | 0.8 nm@15 kV | |
|---|---|---|---|
| 0.9 nm@1 kV | |||
| Magnification | 20～2,000,000 x | ||
| Electron Optics | Emitter | ZrO/W Schottky Emitter | |
| Accelerating Voltage | 0.1～30 kV (0.01 kV step) | ||
| Probe Current | Max. 200 nA | ||
| Detectors | Standard Detectors | UD（Upper Detector) | |
| MD（Middle Detector） | |||
| LD（Lower Detector) | |||
| Optional Detectors | PD-BSED（Semiconductor type） | ||
| UVD (Ultra Variable Pressure Detector） | |||
| Variable Pressure(VP) Mode (Option) | Pressure Range | 5～300 Pa | |
| Available Detectors in VP mode | PD-BSED, UVD, UD, MD,LD | ||
| Specimen Stage | Stage Control | 5-axis Motor Drive | |
| Movable Range | X | 0～135 mm | |
| Y | 0～100 mm | ||
| Z | 1.5～40 mm | ||
| T | -5～70° | ||
| R | 360° | ||
| Specimen Chamber | Specimen Size | Max. φ200 mm, Max. 80mm Height | |
| Monitor（Option) | 23 inch LCD（1,920×1,080) , supports dual monitors operation | ||
| Image Display Mode | Large Screen Display Mode | 1,280×960 pixels | |
| Single Image Display Mode | 800×600 pixels | ||
| Dual Image Display Mode | 800×600 pixels、1,280×960 pixels with dual monitors | ||
| Quad Image Display Mode | 640×480 pixels | ||
| Hex Image Display Mode w/dual monitors | 640×480 pixels with dual monitors | ||
| Image Data Saving | Pixel Size | 640×480、1,280×960、2,560×1,920、5,120×3,840、10,240×7,680 | |
| Optional Accessories | Energy Dispersive X-ray Spectrometer (EDX) | ||
| Wavelength Dispersive X-ray Spectrometer (WDX) | |||
| Electron Backscattered Diffraction Detector (EBSD) | |||
| Cathodoluminescence System (CL) | |||
| Cryogenic Transfer System | |||
| Compatible with various types of sub-stages | |||
Installation Diagram
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