荷蘭 Trymax 干法刻蝕等離子去膠機 |
模塊化設計,腔體規格統一,可四選一等離子源組合 (包括:RIE, MW, MW+RF, DCP)。采用同一操作軟件,達至速度快、產能高的效果。 |
NEO200A 系列 | |
● Handling - Dual Cassette - 3 axis robot ● Chammber Configurations - RF Only (13.56MHz) - Microwave Only (2.45GHz) - Dual Source RF / MW - DCP (13.56MHz) ● 100 to 200mm compatible |
NEO300A 系列 | |
● Handling - Single Loadport (300mm) - 3 axis robot ● Chammber Configurations - RF Only (13.56MHz) - Microwave Only (2.45GHz) - Dual Source RF / MW - DCP (13.56MHz) ● 200 to 300mm compatible |
NEO3400 系列 | |
● Handling - up to 4 Loadports (300mm) - 4 axis robot with X-traverser ● Chammber Configurations - RF Only (13.56MHz) - Microwave Only (2.45GHz) - Dual Source RF / MW - DCP (13.56MHz) ● 200 to 300mm compatible |
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