行業(yè)的新伙伴蔡司EVO掃描電子顯微鏡的品質值得信賴,可助工業(yè)質量保證和失效分析實驗室一臂之力在工業(yè)質量、失效分析或研究領域,由于掃描電子顯微鏡可提供高分辨率成像和高空間分辨率元素化學信息,所以它是金相學和失效分析應用的理想之選
EVO 10 | EVO 15 | EVO 25 | |
分辨率 | 2 nm, 3nm @ 30 kV SE with LaB6, W | ||
3.4 nm @ 30 kV SE VP mode with W | |||
6 nm, 8 nm @ 3 kV SW with LaB6 or W | |||
9 nm, 20 nm @ 1 kV SE with LaB6, W | |||
加速電壓 | 0.2 to 30 kV | ||
探針電流 | 0.5 pA to 5 mA | ||
放大倍數 | < 7 – 1,000,000x | < 5 – 1,000,000x | < 5 – 1,000,000x |
視野大小 | 6 mm at Analytical Working Distance (AWD) | ||
能譜分析工作距離 | 8.5 mm AWD and 35 degree take-off angle | ||
Optibeam 模式 | Resolution, Depth, Analysis, Field, Fisheye | ||
可變真空氣壓范圍 | 10 – 400 Pa (VP option), 10 – 3000 Pa (EP option) | ||
可以配置的探測器 | ETSE / VPSE-G4 / C2D / C2DX HDBSD / YAG-BSD STEM / CL EDS / WDS / EBSD | ||
樣品倉尺寸 | 310 mm (Ø) x 220 mm (h) | 365 mm (Ø) x 275 mm (h) | 420 mm (Ø) x 330 mm (h) |
5軸電動樣品臺 | X = 80 mm, Y = 100 mm, Z = 35 mm, T = - 10° to 90º, R = 360º (continuous) | X = 125 mm, Y = 125 mm, Z = 50 mm, T = -10° to 90º, R = 360º (continuous) | X = 130 mm, Y = 130 mm, Z = 50 mm, T = -10° to 90º, R = 360º (continuous) |
樣品高度 | 100 mm | 145 mm | 210 mm |
圖像尺寸 | Up to 32k x 24k pixels |
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